|1||Ereztech||Di(isopropylamino)Silane, (i-PrHN)2SiH2, DIPAS|
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Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|
|2||Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications|
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