Search 1628 plasma ALD publications by:
Di(Tert-Butyl)Telluride, But2Te, CAS# 83817-35-0
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon|
|2||Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon|