Search 1616 plasma ALD publications by:
Y(iPrCp)3, Yttrium tris(isopropylcyclopentadienyl), CAS# 130206-63-2
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection|