The publication database currently has 1555 entries.
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191 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses
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Search 1555 plasma ALD publications by:
Search 1555 plasma ALD publications by:
Y(iPrCp)3, Yttrium tris(isopropylcyclopentadienyl), CAS# 130206-63-2
Where to buy
| Number | Vendor | Link |
|---|---|---|
| 1 | Ereztech | Tris(i-propylcyclopentadienyl)yttrium(III) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |