Y(iPrCp)3, Yttrium tris(isopropylcyclopentadienyl), CAS# 130206-63-2

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NumberVendorLink
1EreztechTris(i-propylcyclopentadienyl)yttrium(III)

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection