Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Y(iPrCp)3, Yttrium tris(isopropylcyclopentadienyl), CAS# 130206-63-2
Where to buy
Number | Vendor | Link |
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1 | Ereztech | Tris(i-propylcyclopentadienyl)yttrium(III) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |