Aluminum Trichloride, AlCl₃, CAS# 7446-70-0

Informational Websites

Number	Website
1	http://webbook.nist.gov/cgi/cbook.cgi?ID=7446-70-0

Where to buy

Number	Vendor	Link
1	Sigma-Aldrich, Co. LLC	Aluminum chloride anhydrous, powder, 99.999% trace metals basis
2	Alfa Aesar	Aluminum chloride, anhydrous, 99.999% (metals basis)
3	Strem Chemicals, Inc.	Aluminum chloride, anhydrous (99.99+%-Al) PURATREM

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
3	Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
4	Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
5	Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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