|1||Sigma-Aldrich, Co. LLC||Diborane 99.99% (diborane only), 9-11% (balance hydrogen), 10% in hydrogen, electronic grade|
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Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization|
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