Search 1628 plasma ALD publications by:
B2H6, Diborane, Boroethane, Boron hydride, Diboron hexahydride, CAS# 19287-45-7
Where to buy
|1||Sigma-Aldrich, Co. LLC||Diborane 99.99% (diborane only), 9-11% (balance hydrogen), 10% in hydrogen, electronic grade|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia|
|2||Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization|