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Diborane, Boroethane, Boron hydride, Diboron hexahydride, B2H6, CAS# 19287-45-7

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1Sigma-Aldrich, Co. LLCDiborane 99.99% (diborane only), 9-11% (balance hydrogen), 10% in hydrogen, electronic grade does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization

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