Compositional Depth Profiling Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Compositional Depth Profiling returned 98 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
2A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
4Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
5AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
6Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
7Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
8Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
9Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
10Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
11Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
12Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
13Atomic layer deposition of titanium nitride for quantum circuits
14Atomic layer deposition of titanium nitride from TDMAT precursor
15Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
16Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
17Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
18Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
19Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
20Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
21Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
22Characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition using O2 plasma and N2O plasma
23Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
24Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
25Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
26Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
27Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
28Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
29Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
30Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
31Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
32Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
33Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
34Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
35Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
36Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
37Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
38Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
39Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
40Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
41Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
42Fully CMOS-compatible titanium nitride nanoantennas
43Gadolinium nitride films deposited using a PEALD based process
44GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
45GeSbTe deposition for the PRAM application
46Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
47Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
48Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
49Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
50Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al2O3 Gate Dielectrics by CF4 Plasma Treatment
51Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
52Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
53Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
54Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
55Low temperature thin film transistors with hollow cathode plasma-assisted atomic layer deposition based GaN channels
56Low-Temperature Deposition of Hexagonal Boron Nitride Via Sequential Injection of Triethylboron and N2/H2 Plasma
57Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
58Optical and Electrical Properties of AlxTi1-xO Films
59Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
60Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
61Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
62Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
63Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
64Plasma enhanced atomic layer deposition of gallium sulfide thin films
65Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
66Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
67Plasma nitridation of atomic layer deposition (ALD) Al2O3 by NH3 in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell
68Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
69Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
70Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
71Plasma-enhanced ALD system for SRF cavity
72Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
73Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
74Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
75Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
76Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
77Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
78Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
79Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
80Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
81Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
82Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
83Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
84Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
85TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
86The Effects of Annealing Ambient on the Characteristics of La2O3 Films Deposited by RPALD
87The effects of layering in ferroelectric Si-doped HfO2 thin films
88The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
89The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
90The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
91Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma
92Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
93Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
94Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
95Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
96Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
97Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
98ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition


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