Interface Trap Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Interface Trap Density returned 92 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
2	A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3	Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
4	Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
5	AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
6	Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
7	An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
8	Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment
9	Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
10	Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
11	Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
12	Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al2O3, AlN, and Al2O3/AlN laminated dielectrics
13	Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
14	Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
15	Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device
16	Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
17	Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
18	Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
19	Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
20	Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
21	Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
22	Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer
23	Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
24	Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
25	Electrical Properties of Atomic Layer Deposition HfO2 and HfOxNy on Si Substrates with Various Crystal Orientations
26	Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
27	Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
28	Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
29	Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
30	Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
31	Evaluating the Impact of Thermal Annealing on Al2O3/c-Si Interface Properties by Non-Destructive Measurements
32	Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
33	Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
34	Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
35	Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
36	Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
37	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
38	Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
39	Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
40	Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
41	Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
42	Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
43	HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
44	High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
45	High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
46	High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
47	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
48	High-κ insulating materials for AlGaN/GaN metal insulator semiconductor heterojunction field effect transistors
49	Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
50	Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
51	Improved understanding of recombination at the Si/Al2O3 interface
52	Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
53	Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
54	Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium
55	In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
56	In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
57	Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
58	Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
59	Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
60	Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices
61	Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
62	Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
63	Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
64	Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
65	Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface
66	Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
67	Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
68	Low-thermal budget flash light annealing for Al2O3 surface passivation
69	MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
70	Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
71	Nitride passivation of the interface between high-k dielectrics and SiGe
72	Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks
73	Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
74	Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
75	Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
76	Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
77	Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
78	Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
79	Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
80	Silicon surface passivation with atomic layer deposited aluminum nitride
81	Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
82	Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
83	Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
84	Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
85	The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
86	The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
87	Thin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
88	Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
89	Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal
90	Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
91	Very high frequency plasma reactant for atomic layer deposition
92	ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition

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