Breakdown Voltage Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Breakdown Voltage returned 67 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
2A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
3Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
4Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
5AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
6Annealing behavior of ferroelectric Si-doped HfO2 thin films
7Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
8Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
9Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
10Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
11Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
12Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
13Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
14Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
15Densification of Thin Aluminum Oxide Films by Thermal Treatments
16Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
17Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
18Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
19Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
20Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
21Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
22Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
23Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
24Electrical characteristics and step coverage of ZrO2 films deposited by atomic layer deposition for through-silicon via and metal-insulator-metal applications
25Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure
26Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
27Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
28Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
29Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
30Fast PEALD ZnO Thin-Film Transistor Circuits
31Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
32High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
33High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
34Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
35Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
36Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN
37Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
38Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
39Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
40Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
41Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
42Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
43Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
44Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
45Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
46Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
47Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
48Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
49PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
50Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
51Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
52Propagation Effects in Carbon Nanoelectronics
53Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
54Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
55Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
56Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
57Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)
58Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
59Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
60Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
61The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
62The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
63Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
64Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal
65Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
66ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
67ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium


Shortcuts



© 2014-2019 plasma-ald.com