Transistor Characteristics Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Transistor Characteristics returned 74 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
2Comparative study on nitridation and oxidation plasma interface treatment for AlGaN/GaN MIS-HEMTs with AlN gate dielectric
3Effects of Recessed-Gate Structure on AlGaN/GaN-on-SiC MIS-HEMTs with Thin AlOxNy MIS Gate
4Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
5Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer
6Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
7Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal
8Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
9Gate Recessed Quasi-Normally OFF Al2O3/AlGaN/GaN MIS-HEMT With Low Threshold Voltage Hysteresis Using PEALD AlN Interfacial Passivation Layer
10Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
11DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
12Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
13Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
14AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD
15Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
16Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
17Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
18Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
19Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
20Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
21Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
22Controlling threshold voltage and leakage currents in vertical organic field-effect transistors by inversion mode operation
23Advances in the fabrication of graphene transistors on flexible substrates
24Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
25Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
26Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
27The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
28Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
29Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
30Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization
31Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs
32High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
33A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance
34Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
35Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
36ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
37Top-down fabricated ZnO nanowire transistors for application in biosensors
38Improvement of Vth Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiNx as an Interfacial Layer
39Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
40Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
41WS2 transistors on 300 mm wafers with BEOL compatibility
42Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
43Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
44Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
45Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
46Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation
47Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
48Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs
49Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
50Nitride passivation of the interface between high-k dielectrics and SiGe
51Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
52Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
53AlGaN/GaN MIS-HEMTs With High Quality ALD-Al2O3 Gate Dielectric Using Water and Remote Oxygen Plasma As Oxidants
54600 V High-Performance AlGaN/GaN HEMTs with AlN/SiNx Passivation
55Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal
56Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
57Low Current Collapse and Low Leakage GaN MIS-HEMT Using AlN/SiN as Gate Dielectric and Passivation Layer
58Plasma-Enhanced Atomic Layer Deposition of HfO2 on Monolayer, Bilayer, and Trilayer MoS2 for the Integration of High-κ Dielectrics in Two-Dimensional Devices
59Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
60Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer
61Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
62823-mA/mm Drain Current Density and 945-MW/cm2 Baliga's Figure-of-Merit Enhancement-Mode GaN MISFETs With a Novel PEALD-AlN/LPCVD-Si3N4 Dual-Gate Dielectric
63Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
64Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
65Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
66All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
67High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-SiNx/RF-Sputtered-HfO2
68Characteristics of Metal-Oxide-Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique
69ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
70Combined PEALD Gate-Dielectric and In-Situ SiN Cap-Layer for Reduced Vth Shift and RDS-ON Dispersion of AlGaN/GaN HEMTs on 200 mm Si Wafer
71High pulsed current density β-Ga2O3 MOSFETs verified by an analytical model corrected for interface charge