Images Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Images returned 136 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4A route to low temperature growth of single crystal GaN on sapphire
5Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
6Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
7ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
8Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
9Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
10Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
11Atmospheric pressure plasma enhanced spatial ALD of silver
12Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
13Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode
14Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
15Atomic Layer Deposition of Gold Metal
16Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
17Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
18Atomic Layer Deposition of the Solid Electrolyte LiPON
19Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
20Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
21Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
22Bipolar resistive switching in amorphous titanium oxide thin film
23Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
24Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
25Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
26Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
27Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
28Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
29Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
30Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
31Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
32Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
33Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
34Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
35Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
36Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
37Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
38Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
39Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
40Encapsulation method for atom probe tomography analysis of nanoparticles
41Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
42Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
43Enhanced non-volatile memory characteristics with quattro-layer graphene nanoplatelets vs. 2.85-nm Si nanoparticles with asymmetric Al2O3/HfO2 tunnel oxide
44Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
45Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
46Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
47Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition
48Fabrication of flexible polymer-GaN core-shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition
49Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
50Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
51Flexible Memristive Memory Array on Plastic Substrates
52Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
53High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
54High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
55High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
56Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
57Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer
58Improved understanding of recombination at the Si/Al2O3 interface
59Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
60In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
61Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
62Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
63Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
64Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
65Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
66IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
67Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
68Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
69Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
70Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
71Low temperature thin film transistors with hollow cathode plasma-assisted atomic layer deposition based GaN channels
72Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
73Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
74Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
75Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
76Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
77Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
78Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100)
79Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
80Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
81Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
82NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors
83Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
84Nitride memristors
85Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
86Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
87On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
88Oxygen migration in TiO2-based higher-k gate stacks
89Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
90Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
91Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
92Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
93Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
94Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
95Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
96Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
97Plasma enhanced atomic layer deposition of zinc sulfide thin films
98Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
99Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
100Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
101Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
102Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
103Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
104Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
105Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries
106Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
107Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
108Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
109Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
110Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
111Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
112Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
113Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
114Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
115Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
116Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
117Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
118Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
119Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
120Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
121Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
122Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
123Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
124Thin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
125Thin film GaP for solar cell application
126TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
127TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
128Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
129Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
130Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
131Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
132Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
133Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
134Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
135Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
136Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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