Images Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Images returned 126 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4A route to low temperature growth of single crystal GaN on sapphire
5Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
6Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
7ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
8Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
9Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
10Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
11Atmospheric pressure plasma enhanced spatial ALD of silver
12Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
13Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode
14Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
15Atomic Layer Deposition of Gold Metal
16Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
17Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
18Atomic Layer Deposition of the Solid Electrolyte LiPON
19Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
20Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
21Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
22Bipolar resistive switching in amorphous titanium oxide thin film
23Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
24Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
25Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
26Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
27Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
28Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
29Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
30Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
31Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
32Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
33Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
34Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
35Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
36Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
37Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
38Encapsulation method for atom probe tomography analysis of nanoparticles
39Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
40Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
41Enhanced non-volatile memory characteristics with quattro-layer graphene nanoplatelets vs. 2.85-nm Si nanoparticles with asymmetric Al2O3/HfO2 tunnel oxide
42Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
43Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density
44Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
45Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition
46Fabrication of flexible polymer-GaN core-shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition
47Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
48Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
49High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
50High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
51High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
52Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
53Improved understanding of recombination at the Si/Al2O3 interface
54Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
55In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
56Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
57Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
58Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
59Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
60IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
61Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
62Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
63Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
64Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
65Low temperature thin film transistors with hollow cathode plasma-assisted atomic layer deposition based GaN channels
66Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
67Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
68Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
69Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
70Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
71Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
72Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100)
73Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
74Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
75Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
76NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors
77Nitride memristors
78Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
79Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
80On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
81Oxygen migration in TiO2-based higher-k gate stacks
82Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
83Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
84Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
85Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
86Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
87Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
88Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
89Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
90Plasma enhanced atomic layer deposition of zinc sulfide thin films
91Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
92Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
93Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
94Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
95Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
96Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
97Plasma-Enhanced Atomic Layer Deposition of Ultrathin Oxide Coatings for Stabilized Lithium-Sulfur Batteries
98Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
99Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
100Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
101Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
102Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
103Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
104Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
105Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
106Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
107Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
108Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
109Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
110Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
111Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
112Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
113Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
114Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
115Thin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
116Thin film GaP for solar cell application
117TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
118Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
119Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
120Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
121Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
122Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
123Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
124Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
125Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
126Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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