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Publication Information

Title: Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties

Type: Journal

Info: Physica Status Solidi (a)

Date: 2015-11-06

DOI: http://dx.doi.org/10.1002/pssa.201532838

Author Information

Name

Institution

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS)

Oak Ridge National Laboratory

Centre Inter-universitaire de Recherche et d'Ingéniérie des Matériaux (CIRIMAT)

Films

Deposition Temperature = 300C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Agilent 5500

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Advance

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

JEOL 2100F

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Thickness

Optical Reflectivity

Mikropack Nanocalc 2000

Images

SEM, Scanning Electron Microscopy

JEOL JSM-7800F

Substrates

Silicon

Ti

Keywords

Notes

424

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