Publication Information

Title: Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer

Type: Journal

Info: Nature Communications | 6:7817

Date: 2015-06-15

DOI: http://dx.doi.org/10.1038/ncomms8817

Author Information

Name

Institution

Yonsei University

Ulsan National Institute of Science and Technology

Yonsei University

Yonsei University

Yonsei University

Yonsei University

Yonsei University

Yonsei University

Ulsan National Institute of Science and Technology

Yonsei University

Air Liquide

Air Liquide

Yonsei University

Yonsei University

Yonsei University

Films

Plasma MoOx using Unknown

Deposition Temperature = 200C

13939-06-5

7782-44-7

Plasma MoWO using Unknown

Deposition Temperature = 200C

13939-06-5

64561-25-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

JEOL JSM-6701F

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco AFM

Thickness

AFM, Atomic Force Microscopy

Veeco AFM

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Images

Optical Microscopy

Olympus DX51

Raman Spectra

Raman Spectroscopy

Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Photoluminescence

PL, PhotoLuminescence

SPEX 1403

Images

TEM, Transmission Electron Microscope

FEI Titan G2

Chemical Composition, Impurities

STEM-ADF

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

UV-Vis Transmission

Optical Absorption

JASCO V-650

Photocurrent

Custom

Keithley 2400 Source Meter

Substrates

SiO2

Keywords

Notes

367

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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