Publication Information

Title: Atomic Layer Deposition of the Solid Electrolyte LiPON

Type: Journal

Info: Chem. Mater. 2015, 27, 5324-5331

Date: 2015-07-09

DOI: http://dx.doi.org/10.1021/acs.chemmater.5b01654

Author Information

Name

Institution

University of Maryland

University of Maryland

University of Maryland

University of Maryland

University of Maryland

Films

Deposition Temperature = 250C

1907-33-1

7732-18-5

512-56-1

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000D

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

NT-MDT NTEGRA Spectra

Images

SEM, Scanning Electron Microscopy

Hitachi SU-70

Images

TEM, Transmission Electron Microscope

JEOL 2100

Substrates

Silicon

Stainless Steel

CNTs, Carbon NanoTubes

Keywords

Notes

378

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com