Publication Information

Title: Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories

Type: Journal

Info: Nanoscale 2016, Volume 8, Issue 29, pp 13915-13923

Date: 2016-01-24

DOI: http://dx.doi.org/10.1039/C5NR08735J

Author Information

Name

Institution

KU Leuven

KU Leuven

IMEC

KU Leuven

KU Leuven

KU Leuven

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 45C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

TEM, Transmission Electron Microscope

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Substrates

Cu

Keywords

Notes

761

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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