Title: IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
Info: Journal of Nanoscience and Nanotechnology, Volume 14, Number 7, July 2014, pp. 5386-5389(4)
XPS, X-ray Photoelectron Spectroscopy
TEM, Transmission Electron Microscope
PEALD IrO2 nanodot charge storage layer for memory device.
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