Publication Information

Title: IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer

Type: Journal

Info: Journal of Nanoscience and Nanotechnology, Volume 14, Number 7, July 2014, pp. 5386-5389(4)

Date: 2014-07-01

DOI: http://dx.doi.org/10.1166/jnn.2014.8708

Author Information

Name

Institution

Sejong University

Films

Plasma IrO2 using Unknown

Deposition Temperature Range N/A

721427-58-3

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Unknown

Images

TEM, Transmission Electron Microscope

Unknown

Substrates

Keywords

Notes

PEALD IrO2 nanodot charge storage layer for memory device.

265

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