Publication Information

Title: Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition

Type: Journal

Info: ACS Appl. Mater. Interfaces, 2015, 7 (19), pp 10228-10237

Date: 2015-04-28

DOI: http://dx.doi.org/10.1021/acsami.5b00677

Author Information

Name

Institution

National Taiwan University

National Taiwan University

Sunrise Global Solar Energy Co.

Sino-American Silicon Products Inc.

National Taiwan University

Films

Deposition Temperature = 200C

75-24-1

7732-18-5

Deposition Temperature = 200C

3275-24-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

FEI Nova NanoSEM 450

Images

TEM, Transmission Electron Microscope

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Reflectance Spectra

Reflection Spectroscopy

Avantes AvaSpec-2048L

Capacitance

C-V, Capacitance-Voltage Measurements

Agilent B1500A Semiconductor Device Analyzer

Interface State Density

C-V, Capacitance-Voltage Measurements

Agilent B1500A Semiconductor Device Analyzer

Fixed Charge

C-V, Capacitance-Voltage Measurements

Agilent B1500A Semiconductor Device Analyzer

Minority Carrier Lifetime

QSSPC, Quasi-Steady-State PhotoConductance Decay

Sinton WCT-120 Lifetime Tester

Substrates

Si(100)

NBSi, Nanotextured Black Silicon

Keywords

Solar

Passivation

Notes

Ultratech Fiji thermal Al2O3/plasma TiO2 for silicon solar passivation.

318

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