Publication Information

Title: Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate

Type: Journal

Info: ACS Appl. Mater. Interfaces 2015, 7, 2998-3002

Date: 2015-01-27

DOI: http://dx.doi.org/10.1021/am508710s

Author Information

Name

Institution

Seoul National University

Seoul National University

Seoul National University

Nanyang Technological University

University of California - Merced

Seoul National University

Films

Plasma YSZ using Atomic Premium CN1

Deposition Temperature = 250C

19756-04-8

329735-72-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Agilent 5500

Images

TEM, Transmission Electron Microscope

JEOL 2100F

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

PANalytical Xpert PRO MRD X-ray Diffractometer

Density

XRR, X-Ray Reflectivity

PANalytical Xpert PRO MRD X-ray Diffractometer

Substrates

AAO, Anodic Aluminum Oxide

Keywords

SOFC, Solid Oxide Fuel Cell

Notes

CN1 Atomic Premium PEALD YSZ for fuel cell electrolyte.

322

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