Publication Information

Title: Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions

Type: Journal

Info: Journal of Vacuum Science & Technology A 31, 01A147 (2013)

Date: 2012-12-05

DOI: http://dx.doi.org/10.1116/1.4772666

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

Films

Thermal Al2O3 using Custom ICP

Deposition Temperature = 65C

75-24-1

7732-18-5

Plasma Al2O3 using Custom ICP

Deposition Temperature = 65C

75-24-1

7782-44-7

Thermal ZnO using Custom ICP

Deposition Temperature = 65C

557-20-0

7732-18-5

Plasma ZnO using Custom ICP

Deposition Temperature = 65C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Quanta 200 FEG

Chemical Composition, Impurities

XRF, X-Ray Fluorescence

Unknown

Wetting Angle

Contact Angle Measurement

Advex

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Substrates

Polypropylene

PET, Polyethylene Terephthalate

Cotton

Keywords

Notes

674

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com