Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films

Type:
Journal
Info:
Nanotechnology 26 (2015) 265702
Date:
2015-06-09

Author Information

Name Institution
Chung-Ting KoNational Taiwan University
Po-Shuan YangNational Taiwan University
Yin-Yi HanNational Taiwan University
Wei-Cheng WangNational Taiwan University
Jhih-Jie HuangNational Taiwan University
Yen-Hui LeeNational Taiwan University
Yi-Jen TsaiNational Taiwan University
Jay ShiehNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films

Thermal ZnO





Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Optical Properties
Analysis: Optical Absorption

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Substrates

Silicon
TiO2
ZrO2

Notes

373