Publication Information

Title: Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure

Type: Journal

Info: Phys. Status Solidi A, 1-8 (2014)

Date: 2014-06-17

DOI: http://dx.doi.org/10.1002/pssa.201431256

Author Information

Name

Institution

The Australian National University

Seoul National University

The Australian National University

The Australian National University

The Australian National University

Films

Plasma Al2O3 using Beneq TFS-200

Deposition Temperature = 175C

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

Optical Microscopy

Unknown

Photoluminescence

PL, PhotoLuminescence

Unknown

Resistivity, Sheet Resistance

I-V, Current-Voltage Measurements

Keithley 2425 Source Meter

Minority Carrier Lifetime

Unknown

Sinton WCT-120 Lifetime Tester

Film Structure

FTIR, Fourier Transform InfraRed spectroscopy

Bruker Vertex 80V

Fixed Charge

C-V, Capacitance-Voltage Measurements

Unknown

Capacitance

C-V, Capacitance-Voltage Measurements

Unknown

Interface Trap Density

C-V, Capacitance-Voltage Measurements

Unknown

Unknown

Humidity Test

Thermoline Asset 340

Unknown

Climatic Testing

WVC C340

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

VG Scientific ESCALAB 220iXL

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

VG Scientific ESCALAB 220iXL

Substrates

Si(100)

Keywords

Solar

Passivation

Notes

RCA clean + HF dip.

Passivation activated by annealing 95% Ar:5% H2 @ 400C for 30min.

No blistering.

172

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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