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Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
Type:
Journal
Info:
Applied Optics, Vol. 56, No. 4, 2017
Date:
2016-10-12
Author Information
| Name | Institution |
|---|---|
| Svetlana Shestaeva | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Astrid Bingel | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Peter Munzert | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Lilit Ghazaryan | Friedrich-Schiller-Universität Jena |
| Christian Patzig | Fraunhofer Institute for Microstructure of Materials and Systems IMWS |
| Andreas Tünnermann | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Adriana Szeghalmi | Fraunhofer Institute for Applied Optics and Precision Engineering |
Films
Thermal Al2O3
Plasma Al2O3
Plasma SiO2
Plasma SiO2
Thermal SiO2
Plasma HfO2
Film/Plasma Properties
Characteristic: Stress
Analysis: Stress Measurement
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Substrates
| Si(100) |
| SiO2 |
| Lithosil Q1 |
| Glass |
| Glass, BK7 |
Notes
| 878 |