Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 34, 01A151 (2016)
Date:
2015-12-07

Author Information

Name Institution
Gu Young ChoSeoul National University
Seungtak NohSeoul National University
Yoon Ho LeeSeoul National University
Sanghoon JiSeoul National University
Soon Wook HongHanyang University
Bongjun KooHanyang University
Jihwan AnSeoul National University of Science and Technology
Young-Beom KimHanyang University
Suk Won ChaSeoul National University

Films



Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

AAO, Anodic Aluminum Oxide
Silicon

Notes

447