Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode

Type:
Journal
Info:
2015 Nanotechnology 26 094001
Date:
2015-01-06

Author Information

Name Institution
Cao GuanNational University Singapore
Xu QianNanjing University
Xinghui WangNanyang Technological University
Yanqiang CaoNanjing University
Qing ZhangNanyang Technological University
Aidong LiNanjing University
John WangNational University Singapore

Films

Plasma CoOx


Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Substrates

CNTs, Carbon NanoTubes
Carbon Cloth
Silicon

Notes

Picosun SUNALE R200 PEALD Co3O4 for supercapacitor application.
323