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Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
Type:
Journal
Info:
19 December 2011 / Vol. 19, No. 27 / OPTICS EXPRESS
Date:
2011-11-19
Author Information
| Name | Institution |
|---|---|
| Joshua D. Caldwell | U.S. Naval Research Laboratory |
| Orest J. Glembocki | U.S. Naval Research Laboratory |
| Francisco J. Bezares | U.S. Naval Research Laboratory |
| Maarit I. Kariniemi | University of Helsinki |
| Jaakko T. Niinistö | University of Helsinki |
| Timo T. Hatanpää | University of Helsinki |
| Ronald W. Rendell | U.S. Naval Research Laboratory |
| Maraizu Ukaegbu | Howard University |
| Mikko K. Ritala | University of Helsinki |
| Sharka M. Prokes | U.S. Naval Research Laboratory |
| Charles M. Hosten | Howard University |
| Markku A. Leskelä | University of Helsinki |
| Richard Kasica | CNST-NIST |
Films
Plasma Ag
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: SERS
Analysis: SERS, Surface Enhanced Raman Scattering
Substrates
| Silicon |
Notes
| Beneq TFS-200 Ag PEALD on Si nanopillar templates to achieve large-area, periodic "hot-spot" arrays. |
| 177 |