Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 35 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A route to low temperature growth of single crystal GaN on sapphire
2Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
3Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
4Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
5Comparison of trimethylgallium and triethylgallium as 'Ga' source materials for the growth of ultrathin GaN films on Si(100) substrates via hollow-cathode plasma-assisted atomic layer deposition
6Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
7Effect of substrate temperature and Ga source precursor on growth and material properties of GaN grown by hollow cathode plasma assisted atomic layer deposition
8Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
9Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
10Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
11In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
12Influence of N2/H2 and N2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition
13Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
14Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
15Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100)
16Low-temperature sequential pulsed chemical vapor deposition of ternary BxGa1-xN and BxIn1-xN thin film alloys
17Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition
18Optical properties and bandgap evolution of ALD HfSiOx films
19PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
20Plasma enhanced atomic layer deposition of aluminum sulfide thin films
21Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
22Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
23Plasma-enhanced atomic layer deposition of superconducting niobium nitride
24Plasma-enhanced atomic layer deposition of tungsten nitride
25Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
26Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
27Properties of AlN grown by plasma enhanced atomic layer deposition
28Remote Plasma ALD of Platinum and Platinum Oxide Films
29Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
30Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
31Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
32Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition
33Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
34Thin film GaP for solar cell application
35Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs


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