Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 68 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
2Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
3Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
4Plasma-enhanced atomic layer deposition of superconducting niobium nitride
5Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
6Atomic layer deposition of InN using trimethylindium and ammonia plasma
7Plasma-enhanced atomic layer deposition of titanium vanadium nitride
8Optical properties and bandgap evolution of ALD HfSiOx films
9Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
10Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
11A route to low temperature growth of single crystal GaN on sapphire
12Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
13Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
14Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
15Plasma-enhanced atomic layer deposition of tungsten nitride
16Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
17Properties of AlN grown by plasma enhanced atomic layer deposition
18Plasma enhanced atomic layer deposition of gallium sulfide thin films
19Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
20Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
21Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
22Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
23Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
24Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
25Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
26Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
27Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
28Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
29Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
30An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
31Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
32Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
33Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
34Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
35Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
36Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
37Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
38Plasma enhanced atomic layer deposition of aluminum sulfide thin films
39Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
40Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
41Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
42Plasma-enhanced atomic layer deposition of vanadium nitride
43Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
44Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
45Thin film GaP for solar cell application
46Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
47Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
48Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
49PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
50Remote Plasma ALD of Platinum and Platinum Oxide Films
51Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
52Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
53Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
54In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
55Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
56Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
57Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
58Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia