Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 70 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
2Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
3Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
4Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
5Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
6Properties of AlN grown by plasma enhanced atomic layer deposition
7Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
8Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
9Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
10Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
11PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
12Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
13Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
14Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
15Thin film GaP for solar cell application
16Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
17An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
18Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
19Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
20Remote Plasma ALD of Platinum and Platinum Oxide Films
21Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
22Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
23Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
24Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
25Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
26Optical properties and bandgap evolution of ALD HfSiOx films
27Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
28Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
29Plasma enhanced atomic layer deposition of aluminum sulfide thin films
30Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
31Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
32Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
33Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
34Plasma-enhanced atomic layer deposition of superconducting niobium nitride
35Plasma-enhanced atomic layer deposition of tungsten nitride
36Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
37Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
38Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
39Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
40Plasma enhanced atomic layer deposition of gallium sulfide thin films
41Plasma enhanced atomic layer deposited silicon dioxide with divalent Si precursor [N,N'-tert-butyl-1,1-dimethylethylenediamine silylene]
42Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
43Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
44Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
45Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
46Plasma-enhanced atomic layer deposition of vanadium nitride
47Atomic layer deposition of InN using trimethylindium and ammonia plasma
48Plasma-enhanced atomic layer deposition of titanium vanadium nitride
49In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
50Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
51Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
52Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
53A route to low temperature growth of single crystal GaN on sapphire
54Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
55Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
56Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
57Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
58Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
59Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
60Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma