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Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 70 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
2An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
3Thin film GaP for solar cell application
4Atomic layer deposition of InN using trimethylindium and ammonia plasma
5Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
6Remote Plasma ALD of Platinum and Platinum Oxide Films
7Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
8Plasma-enhanced atomic layer deposition of superconducting niobium nitride
9Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
10Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
11Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
12Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
13Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
14Plasma enhanced atomic layer deposited silicon dioxide with divalent Si precursor [N,N'-tert-butyl-1,1-dimethylethylenediamine silylene]
15Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
16Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
17PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
18Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
19Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
20Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
21Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
22Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
23Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
24Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
25Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
26Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
27Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
28Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
29Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
30Optical properties and bandgap evolution of ALD HfSiOx films
31Plasma-enhanced atomic layer deposition of vanadium nitride
32Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
33Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
34Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
35Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
36Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
37Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
38Plasma enhanced atomic layer deposition of aluminum sulfide thin films
39Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
40Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
41Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
42A route to low temperature growth of single crystal GaN on sapphire
43Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
44Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
45Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
46Properties of AlN grown by plasma enhanced atomic layer deposition
47Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
48Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
49Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
50In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
51Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
52Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
53Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
54Plasma-enhanced atomic layer deposition of tungsten nitride
55Plasma enhanced atomic layer deposition of gallium sulfide thin films
56Plasma-enhanced atomic layer deposition of titanium vanadium nitride
57Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
58Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
59Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
60Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy