Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 56 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A route to low temperature growth of single crystal GaN on sapphire
2An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
3Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
4Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
5Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
6Atomic layer deposition of InN using trimethylindium and ammonia plasma
7Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
8Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
9Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
10Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
11Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
12Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
13Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
14Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
15Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
16Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
17In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
18Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
19Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
20Optical properties and bandgap evolution of ALD HfSiOx films
21Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
22PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
23Plasma enhanced atomic layer deposition of aluminum sulfide thin films
24Plasma enhanced atomic layer deposition of gallium sulfide thin films
25Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
26Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
27Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
28Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
29Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
30Plasma-enhanced atomic layer deposition of superconducting niobium nitride
31Plasma-enhanced atomic layer deposition of titanium vanadium nitride
32Plasma-enhanced atomic layer deposition of tungsten nitride
33Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
34Plasma-enhanced atomic layer deposition of vanadium nitride
35Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
36Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
37Properties of AlN grown by plasma enhanced atomic layer deposition
38Remote Plasma ALD of Platinum and Platinum Oxide Films
39Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
40Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
41Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
42Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
43Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
44Thin film GaP for solar cell application
45Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
46Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs