Extinction Coefficient Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Extinction Coefficient returned 70 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
2Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
3Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
4Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
5An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
6Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
7Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
8Plasma enhanced atomic layer deposited silicon dioxide with divalent Si precursor [N,N'-tert-butyl-1,1-dimethylethylenediamine silylene]
9Optical properties and bandgap evolution of ALD HfSiOx films
10Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
11Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
12Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
13In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
14Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
15Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
16Plasma enhanced atomic layer deposition of aluminum sulfide thin films
17Plasma-enhanced atomic layer deposition of tungsten nitride
18Properties of AlN grown by plasma enhanced atomic layer deposition
19Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
20Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
21Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
22Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
23Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
24Plasma-enhanced atomic layer deposition of vanadium nitride
25Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
26Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
27Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
28Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
29Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
30Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
31Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
32Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
33Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
34Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
35Plasma enhanced atomic layer deposition of gallium sulfide thin films
36Plasma-enhanced atomic layer deposition of superconducting niobium nitride
37Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
38Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
39PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
40Plasma-enhanced atomic layer deposition of titanium vanadium nitride
41Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
42Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
43Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
44A route to low temperature growth of single crystal GaN on sapphire
45Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
46Thin film GaP for solar cell application
47Remote Plasma ALD of Platinum and Platinum Oxide Films
48Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
49Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
50Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
51Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
52Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
53Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
54Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
55Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
56Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
57Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
58Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
59Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
60Atomic layer deposition of InN using trimethylindium and ammonia plasma