Plasma Species Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Plasma Species returned 21 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
2Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
3Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
4Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
5Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
6Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
7In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
8Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition
9Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
10Low temperature plasma enhanced deposition of GaP films on Si substrate
11Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
12Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
13Plasma enhanced atomic layer deposition of aluminum sulfide thin films
14Plasma enhanced atomic layer deposition of zinc sulfide thin films
15Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
16Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
17Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
18Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
19Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
20The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
21Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition


Shortcuts



© 2014-2018 plasma-ald.com