Mobility Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Mobility returned 47 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
3Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
4Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
5Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
6Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
7Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
8Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
9Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
10Plasma-Modified Atomic Layer Deposition
11Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
12Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
13Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
14Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
15Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
16Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
17High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
18Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
19High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
20Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
21Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
22Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
23Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
24Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
25Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
26Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
27Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
28Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors
29Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
30Gate Insulator for High Mobility Oxide TFT
31Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
32Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
33Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
34The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
35Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
36A route to low temperature growth of single crystal GaN on sapphire
37Perspectives on future directions in III-N semiconductor research
38The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
39Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
40Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
41Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
42Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
43Fast Flexible Plastic Substrate ZnO Circuits
44Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
45Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
46Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique