Gas Phase Species Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Phase Species returned 35 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
5Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
6Fundamental beam studies of radical enhanced atomic layer deposition of TiN
7Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
8Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
9Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
10In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
11In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
12Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
13Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
14Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
15Plasma enhanced atomic layer deposition of aluminum sulfide thin films
16Plasma enhanced atomic layer deposition of Ga2O3 thin films
17Plasma enhanced atomic layer deposition of gallium sulfide thin films
18Plasma enhanced atomic layer deposition of zinc sulfide thin films
19Plasma Enhanced Atomic Layer Deposition on Powders
20Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
21Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
22Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
23Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
24Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
25Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
26Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
27Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
28Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
29Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
30Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
31Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
32The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
33The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
34The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
35Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor


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