Gas Phase Species Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Phase Species returned 38 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
5Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
6Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
7Fundamental beam studies of radical enhanced atomic layer deposition of TiN
8Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
9Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
10Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
11In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
12In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
13Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
14Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
15Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
16Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
17Plasma enhanced atomic layer deposition of aluminum sulfide thin films
18Plasma enhanced atomic layer deposition of Ga2O3 thin films
19Plasma enhanced atomic layer deposition of gallium sulfide thin films
20Plasma enhanced atomic layer deposition of zinc sulfide thin films
21Plasma Enhanced Atomic Layer Deposition on Powders
22Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
23Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
24Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
25Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
26Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
27Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
28Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
29Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
30Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
31Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
32Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
33Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
34Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
35The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
36The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
37The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
38Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor


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