Gas Phase Species Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Phase Species returned 48 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
2Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
3The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
4Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
5Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
6Fundamental beam studies of radical enhanced atomic layer deposition of TiN
7Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
8Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
9Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
10Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
11Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
12Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
13New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
14Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
15Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
16Plasma enhanced atomic layer deposition of zinc sulfide thin films
17Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
18Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
19Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
20Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
21Mass Spectrometry Study of Li2CO3 Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
22Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
23Plasma enhanced atomic layer deposition of aluminum sulfide thin films
24Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
25Plasma enhanced atomic layer deposition of gallium sulfide thin films
26Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
27Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
28Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
29Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
30Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
31Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
32Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
33Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
34The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
35Plasma enhanced atomic layer deposition of Ga2O3 thin films
36Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
37Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
38Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
39In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
40Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
41The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
42Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
43In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
44Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
45The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
46Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
47Plasma Enhanced Atomic Layer Deposition on Powders
48Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma