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Gas Phase Species Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Phase Species returned 31 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
5Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
6Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
7Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
8Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
9In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
10In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
11Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
12Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
13Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
14Plasma enhanced atomic layer deposition of aluminum sulfide thin films
15Plasma enhanced atomic layer deposition of Ga2O3 thin films
16Plasma enhanced atomic layer deposition of zinc sulfide thin films
17Plasma Enhanced Atomic Layer Deposition on Powders
18Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
19Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
20Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
21Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
22Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
23Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
24Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
25Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
26Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
27Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
28Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
29The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
30The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
31Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor


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