Carrier Concentration Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Carrier Concentration returned 42 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
2Perspectives on future directions in III-N semiconductor research
3Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
4P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
5Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
6Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
7Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
8Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
9Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
10Plasma-Modified Atomic Layer Deposition
11Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
12Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
13Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
14Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
15Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
16n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
17Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
18Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
19Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
20Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
21Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
22The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
23Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
24Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
25Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
26Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
27The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
28Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
29Capacitance characterization of GaP/n-Si structures grown by PE-ALD
30Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
31Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
32Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
33Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
34High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
35Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
36Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
37Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
38Microwave properties of superconducting atomic-layer deposited TiN films
39Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
40All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
41Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
42Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD