Carrier Concentration Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Carrier Concentration returned 41 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
2Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
3Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
4Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
5Capacitance characterization of GaP/n-Si structures grown by PE-ALD
6Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
7Plasma-Modified Atomic Layer Deposition
8Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
9Comparison of thermal, plasma-enhanced and layer by layer Ar plasma treatment atomic layer deposition of Tin oxide thin films
10Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
11Perspectives on future directions in III-N semiconductor research
12Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
13Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
14Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
15Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
16Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
17Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
18Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping
19Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
20Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
21Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
22Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
23The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
24Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
25Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
26Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
27Microwave properties of superconducting atomic-layer deposited TiN films
28n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
29High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
30Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
31Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
32The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
33Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
34Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
35Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
36Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
37Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
38P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
39All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
40Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
41Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition