Diffusion Barrier Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Diffusion Barrier Properties returned 41 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of titanium nitride from TDMAT precursor
2Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
3Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
5Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
6Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
7Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films
8Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
9Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
10Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
11Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
12Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
13Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization
14Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
15From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
16Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu
17Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier
18Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
19Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
20Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
21Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
22A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
23Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
24TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
25Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
26Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells
27Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
28Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
29Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
30An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
31Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
32Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
33The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
34Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
35Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
36Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
37Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
38Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
39Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
40Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
41Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma