Unknown Plasma Enhanced Atomic Layer Deposition Publications

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NumberTitle
1Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
2Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
3Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure
4Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
5Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
6Integrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation
7A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
8Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
9Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
10Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
11Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
12Optical and Electrical Properties of TixSi1-xOy Films
13Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
14Room-Temperature Atomic Layer Deposition of Platinum
15Trilayer Tunnel Selectors for Memristor Memory Cells
16Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
17Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN
18High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
19Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
20Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
21Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
22Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
23Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
24PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells
25Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
26Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
27Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
28The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
29Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
30Densification of Thin Aluminum Oxide Films by Thermal Treatments
31The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
32ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
33Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
34Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation
35Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
36Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
37Silicon nanowire lithium-ion battery anodes with ALD deposited TiN coatings demonstrate a major improvement in cycling performance
38Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
39Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
40Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
41Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation