Optical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Optical Properties returned 46 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
2Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
3Comparative study of ALD SiO2 thin films for optical applications
4Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
5The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
6In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
7Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
8Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
9Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
10Structural and optical characterization of low-temperature ALD crystalline AlN
11Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
12Optical properties and bandgap evolution of ALD HfSiOx films
13Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
14Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
15Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
16Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
17The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
18Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
19Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
20Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
21Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
22Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
23New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
24Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
25Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
26Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
27Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
28Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
29Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
30Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
31Atmospheric pressure plasma enhanced spatial ALD of silver
32Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
33Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
34Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
35In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
36Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
37Gallium nitride thin films by microwave plasma-assisted ALD
38Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
39The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
40Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
41Fully CMOS-compatible titanium nitride nanoantennas
42Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
43Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
44Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
45Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition