Optical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Optical Properties returned 37 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atmospheric pressure plasma enhanced spatial ALD of silver
2Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
3Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
4Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
5Comparative study of ALD SiO2 thin films for optical applications
6Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
7Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
8Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
9Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
10Fully CMOS-compatible titanium nitride nanoantennas
11Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
12Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
13Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
14Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
15Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
16Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
17Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
18Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
19New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
20Optical properties and bandgap evolution of ALD HfSiOx films
21Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
22Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
23Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
24Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
25Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
26Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
27Structural and optical characterization of low-temperature ALD crystalline AlN
28Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
29Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
30Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
31Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
32Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
33The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
34The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
35The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
36Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting


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