Adhesion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Adhesion returned 28 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
2Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
3Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
4Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
5Capacitance spectroscopy of gate-defined electronic lattices
6Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
7Copper-ALD Seed Layer as an Enabler for Device Scaling
8Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
9Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
10Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
11High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
12Hydrogen plasma-enhanced atomic layer deposition of copper thin films
13Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
14In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
15Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
16Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
17Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
18Mechanical properties of thin-film Parylene-metal-Parylene devices
19PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
20Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
21Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
22Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
23Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
24Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
25Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
26Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
27Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
28Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection