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Adhesion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Adhesion returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
2Capacitance spectroscopy of gate-defined electronic lattices
3Copper-ALD Seed Layer as an Enabler for Device Scaling
4Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
5Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
6Hydrogen plasma-enhanced atomic layer deposition of copper thin films
7In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
8Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
9Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
10PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
11Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
12Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
13Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
14Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
15Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
16Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

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