Wet Etch Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Wet Etch Resistance returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N₂ Plasma
2	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N₂ Plasma on Planar and 3D Substrate Topographies
3	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH₃/O₂ Plasma
4	Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
5	Plasma Enhanced Atomic Layer Deposition of SiO₂ Using Space-Divided Plasma System
6	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
7	The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
8	Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
9	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

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