Wet Etch Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Wet Etch Resistance returned 33 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
2Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
3Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
4Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
5Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance
6Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
7Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
8Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
9Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
10Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
11Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
12Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
13High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane
14Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
15Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
16Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
17Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
18Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
19Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
20Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
21Challenges in spacer process development for leading-edge high-k metal gate technology
22The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
23Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
24Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
25Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
26Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
27Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
28Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
29Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition
30Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
31Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
32Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
33Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies