Wet Etch Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Wet Etch Resistance returned 29 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
2Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
3Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
4Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
5Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
6Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
7Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
8Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
9Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
10Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
11Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
12Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
13The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
14Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
15Challenges in spacer process development for leading-edge high-k metal gate technology
16Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
17Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
18Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
19Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
20Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
21Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
22Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
23Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
24Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
25Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
26Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
27Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
28High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane
29Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2