Wet Etch Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Wet Etch Resistance returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
2	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
3	Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
4	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
5	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
6	Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
7	Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
8	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
9	Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
10	Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
11	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
12	The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
13	Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
14	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

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