Surface Reactions Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Reactions returned 28 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
2Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
3Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
4Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition
5Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
6Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
7Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy
8Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
9Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
10Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets
11Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
12Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
13Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
14Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
15In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
16Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
17Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
18Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
19Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
20Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
21Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
22Fundamental beam studies of radical enhanced atomic layer deposition of TiN
23Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
24Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
25Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
26Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
27Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
28Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy