Uniformity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Uniformity returned 30 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
2Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
3Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
4Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
5Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
6Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
7Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
8Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
9Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
10Innovative remote plasma source for atomic layer deposition for GaN devices
11Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
12Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
13Film Uniformity in Atomic Layer Deposition
14Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
15Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
16Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
17Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
18Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
19Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
20Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
21Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
22Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
23Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
24Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
25Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
26Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
27Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
28Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
29Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
30Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing