Your search for plasma enhanced atomic layer deposition publications discussing Uniformity returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia|
|2||PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity|
|3||Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2|
|4||Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies|
|5||Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization|
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