Uniformity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Uniformity returned 25 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
2Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
3Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
4Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
5Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
6Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
7Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
8Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
9Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
10Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
11Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
12Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
13Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
14Film Uniformity in Atomic Layer Deposition
15Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
16Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
17Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
18Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
19Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
20PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
21Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
22Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
23Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
24Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
25Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization