Precursor Characterization Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Precursor Characterization returned 19 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
2Atomic Layer Deposition of Gold Metal
3Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
4Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
5Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
6Copper-ALD Seed Layer as an Enabler for Device Scaling
7Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
8From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
9Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
10PEALD of Copper using New Precursors for Next Generation of Interconnections
11PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
12Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
13Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
14Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
15Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
16Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
17Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
18Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
19Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD