Interlayer Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Interlayer returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma
2	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
3	Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1-xN thin films at low temperatures
4	Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
5	Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
6	Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
7	In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
8	Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
9	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
10	Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
11	The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
12	Thin film GaP for solar cell application
13	Very high frequency plasma reactant for atomic layer deposition
14	Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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