Etch Rate Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Etch Rate returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
2Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
3Composite materials and nanoporous thin layers made by atomic layer deposition
4PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
5Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
6Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
7Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
8Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor
9Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
10High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
11DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
12Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
13Electrical Properties of Alumina Films by Plasma-Enhanced Atomic Layer Deposition
14A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems
15Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
16A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
17Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
18Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
19Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
20Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition