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Nucleation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nucleation returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
2Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
3Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
4In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
5Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
6Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
7Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
8Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
9Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
10Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
11In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
12Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
13Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
14Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
15Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
16Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
17Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
18Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
19Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
20Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods