Nucleation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nucleation returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
2Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
3Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
4Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
5Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
6Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
7Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
8Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
9Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods

Mark Sowa

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