Nucleation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nucleation returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
2	Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
3	Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
4	Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
5	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
6	Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
7	Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
8	Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
9	Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
10	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods

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