Surface Recombination Velocity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Recombination Velocity returned 20 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
2Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
4Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
5Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
6Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
7Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
8Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface
9Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
10Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
11Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
12Improved understanding of recombination at the Si/Al2O3 interface
13Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
14Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
15Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
16Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
17Passivation effects of atomic-layer-deposited aluminum oxide
18Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
19Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
20Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge