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Optical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Optical Properties returned 46 record(s).

NumberTitle
1Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
2Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
3Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting
4Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
5Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
6Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
7Comparative study of ALD SiO2 thin films for optical applications
8In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
9Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
10Gallium nitride thin films by microwave plasma-assisted ALD
11Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
12Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
13Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
14Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
15Optical properties and bandgap evolution of ALD HfSiOx films
16Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
17Structural and optical characterization of low-temperature ALD crystalline AlN
18Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
19The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
20New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
21In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
22Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
23Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
24Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
25Fully CMOS-compatible titanium nitride nanoantennas
26Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
27Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
28Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
29Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
30Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
31Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
32Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
33Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
34Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
35Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process
36Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
37Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
38The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
39Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
40Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
41Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
42Atmospheric pressure plasma enhanced spatial ALD of silver
43The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
44Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
45Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition