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Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Type:
Journal
Info:
Applied Catalysis B: Environmental 91 (2009) 628 - 633
Date:
2009-06-30
DOI:
http://dx.doi.org/10.1016/j.apcatb.2009.06.037

Author Information

Name Institution
Changsoo LeePohang University of Science and Technology (POSTECH)
Jungwon KimPohang University of Science and Technology (POSTECH)
J. Y. SonPohang University of Science and Technology (POSTECH)
Wonyong ChoiPohang University of Science and Technology (POSTECH)
Hyungjun KimPohang University of Science and Technology (POSTECH)

Films

Plasma TiO2

Hardware used: Custom Remote Inductively Coupled Plasma
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Optical Properties
Analysis: Ellipsometry
Diagnostic: -

Characteristic: Adhesion
Analysis: Custom
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Characteristic: Photocatalytic Activity
Analysis: Contact Angle Measurement
Diagnostic: -

Characteristic: Photocatalytic Activity
Analysis: Organic Compound Decomposition
Diagnostic: Custom

Substrates

Polyimide

Notes

749