J. Y. Son Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Y. Son returned 5 record(s).

Number	Title
1	Nitride mediated epitaxy of CoSi₂ through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
2	Plasma-Enhanced ALD of TiO₂ Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
3	Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
4	Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO₂
5	Photocatalytic functional coatings of TiO₂ thin films on polymer substrate by plasma enhanced atomic layer deposition