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Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (3), pp 3178-3185
Date:
2016-12-29
DOI:
http://dx.doi.org/10.1021/acsami.6b14882

Author Information

Name Institution
M. B. SreedharaJawaharlal Nehru Centre for Advanced Scientific Research
J. GhatakJawaharlal Nehru Centre for Advanced Scientific Research
B. BharathJawaharlal Nehru Centre for Advanced Scientific Research
C. N. R. RaoJawaharlal Nehru Centre for Advanced Scientific Research

Films

Plasma VOx

Hardware used: Beneq TFS-200
VO(acac)2, VO(pd)2, Vanadyl acetylacetonate, oxobis(2,4-pentanedionato)vanadium(IV)
CAS#: 3153-26-2
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 170-240C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Diagnostic: Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Diagnostic: Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Omicron Nanotechnology XM 1000 MkII/Sphera system

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova NanoSEM 600

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova NanoSEM 600

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Innova

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan S 80-300 TEM/STEM

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan S 80-300 TEM/STEM

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: FEI Titan S 80-300 TEM/STEM

Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Diagnostic: FEI Titan S 80-300 TEM/STEM

Characteristic: Optical Properties
Analysis: Optical Absorption
Diagnostic: PerkinElmer UV-Vis spectrometer

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Characteristic: Photoresponse
Analysis: Custom
Diagnostic: Keithley 4200-SCS

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Keithley 4200-SCS

Characteristic: Humidity Sensor
Analysis: Custom
Diagnostic: Keithley 4200-SCS

Substrates

Sapphire

Notes

846