About Plasma ALD, LLC

The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting

Type:
Journal
Info:
J. Phys. Chem. C, 2016, 120 (13), pp 7025-7032
Date:
2016-03-12
DOI:
http://dx.doi.org/10.1021/acs.jpcc.6b01144

Author Information

Name Institution
Ahmad W. AmerThe American University in Cairo
Mostafa A. El-SayedGeorgia Institute of Technology
Nageh K. AllamThe American University in Cairo

Films

Plasma ZrN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDEAZr, tetrakis(diethylamido)zirconium, zirconium diethylamide, (Et2N)4Zr
CAS#: 13801-49-5
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Ultra 60 FE-SEM

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss LEO Supra 55

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Optical Properties
Analysis: Optical Absorption
Diagnostic: Shimadzu UV-3101PC UV-Vis-NIR Spectrophotometer5

Characteristic: Optical Bandgap
Analysis: Optical Absorption
Diagnostic: Shimadzu UV-3101PC UV-Vis-NIR Spectrophotometer5

Substrates

ZrO2

Notes

779