Electron Density, ne Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Density, ne returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
4Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
6Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
7Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
8Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
9The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
10Thermal Stability of ALD HfO2 Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma


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