Electron Density, ne Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Density, ne returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
4Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
5Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
6Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
7The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides


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