Damage, Defects Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Damage, Defects returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
3Capacitance characterization of GaP/n-Si structures grown by PE-ALD
4Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
5High-Reflective Coatings For Ground and Space Based Applications
6Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
7Influence of PE-ALD of GaP on the Silicon Wafers Quality
8Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
9Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
10Mechanical properties of thin-film Parylene-metal-Parylene devices
11Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
12PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
13Study of GaP/Si Heterojunction Solar Cells
14Using top graphene layer as sacrificial protection during dielectric atomic layer deposition