Damage, Defects Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Damage, Defects returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD
3Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
4High-Reflective Coatings For Ground and Space Based Applications
5Influence of PE-ALD of GaP on the Silicon Wafers Quality
6PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
7Study of GaP/Si Heterojunction Solar Cells
8Using top graphene layer as sacrificial protection during dielectric atomic layer deposition


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