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Damage, Defects Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Damage, Defects returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
2Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
3Mechanical properties of thin-film Parylene-metal-Parylene devices
4Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
5PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
6Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
7A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
8Capacitance characterization of GaP/n-Si structures grown by PE-ALD
9Study of GaP/Si Heterojunction Solar Cells
10Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
11Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer
12Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
13High-Reflective Coatings For Ground and Space Based Applications
14Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
15Influence of PE-ALD of GaP on the Silicon Wafers Quality