Fixed Charge Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Fixed Charge Density returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Capacitance and conductance versus voltage characterization of Al₂O₃ layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
2	Controlling the fixed charge and passivation properties of Si(100)/Al₂O₃ interfaces using ultrathin SiO₂ interlayers synthesized by atomic layer deposition
3	Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p⁺ Regions
4	Localized defect states and charge trapping in atomic layer deposited-Al₂O₃ films
5	Negative charge trapping effects in Al₂O₃ films grown by atomic layer deposition onto thermally oxidized 4H-SiC
6	Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
7	Plasma-assisted atomic layer deposition of TiN/Al₂O₃ stacks for metal-oxide-semiconductor capacitor applications
8	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
9	Status and prospects of Al₂O₃-based surface passivation schemes for silicon solar cells

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