Passivation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Passivation returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
2Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
4Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
5Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
6Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
7Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
8Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
9Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
10Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3


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