Passivation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Passivation returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
2Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
4Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
5Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
6Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
7Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
8Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
9Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3


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