Passivation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Passivation returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
2Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
3Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
4Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
5Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
6Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation
7Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
8Passivation of organic light-emitting diodes with aluminum oxide thin films grown by plasma-enhanced atomic layer deposition
9Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
10Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
11Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
12Tube-type plasma-enhanced atomic layer deposition of aluminum oxide: Enabling record lab performance for the industry with demonstrated cell efficiencies >24%
13Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3